Advancing semiconductor safety with FTIR gas analysis: Leak detection, emissions monitoring and workplace safety
Gas monitoring in semiconductor manufacturing: Why it matters
The semiconductor industry relies heavily on hazardous gases in etching, doping, and deposition processes. Ensuring workplace safety, environmental compliance, and process reliability requires advanced gas detection solutions. FTIR (Fourier Transform Infrared) spectroscopy offers a comprehensive approach by simultaneously detecting multiple gases, monitoring emissions, and ensuring a safe working environment for employees, even at trace levels.
Key gases from semiconductor processes
Semiconductor fabrication involves multiple steps, all of which utilize hazardous gases. The FTIR analyzer can detect and quantify all the key gases, like:
- Hydrogen fluoride (HF) – Used in etching and cleaning processes, HF is highly toxic and corrosive.
- Ammonia (NH₃) – A critical component in nitride-based processes, but hazardous at high concentrations.
- Silane (SiH4) – used as precursors for various thin films, insulating layers, and in processes like chemical vapor deposition (CVD), however it is a poisonous gas, with a strong repulsive odor.
- Hydrogen chloride (HCl) – Used for wafer surface treatment, requiring careful monitoring.
- Volatile organic compounds (VOCs) – Common in various process chemicals, contributing to workplace exposure risks.
- Sulfur hexafluoride (SF₆) and perfluorocarbons (PFCs) – Utilized in etching and plasma cleaning, these gases also pose environmental concerns due to their high global warming potential.
- Nickel carbonyl (Ni(CO)₄) – A highly toxic gas produced in certain semiconductor metallization processes, posing severe health risks even at ppb-level concentrations.
Ensuring workplace safety, environmental compliance, and process reliability requires advanced gas detection solutions.
Procedures for gas monitoring and safety in semiconductor production
Effective gas monitoring in semiconductor facilities involves a combination of leak detection, continuous emissions tracking and workplace air quality assessments:
- Leak detection – Periodic checks near gas delivery systems, valves and process chambers help identify leaks early, reducing risks of accidental exposure.
- Emissions monitoring – Continuous measurements ensure compliance with environmental regulations by tracking emissions of potent GHGs such as SF6, PFCs & nitrogen trifluoride NF3 gases and other pollutants.
- Workplace safety assessments – Ambient air monitoring in cleanrooms and work areas prevents chronic exposure to hazardous substances, safeguarding employee health.
- Rapidly resolve workplace air quality incidents – Halting production resulting from reported odors and smells in the fab can be very costly. The GT5000 Terra, equipped with its powerful Identification Tool, quickly identifies and quantifies toxic gases, providing an efficient solution to mitigate such incidents..
Emission monitoring in semiconductor facilities
Controlling emissions is a critical part of semiconductor manufacturing, especially due to the use of fluorinated greenhouse gases with high global warming potential. FTIR-based emissions monitoring enables continuous measurement of gases, supporting both regulatory compliance and corporate sustainability goals.
With the ability to monitor multiple compounds simultaneously and at low concentrations, continuous emission monitoring systems help semiconductor fabs stay ahead of tightening environmental regulations.
Meeting evolving safety and compliance demands
As semiconductor processes evolve, new challenges arise for industrial hygiene and emissions control. Semiconductor processes are using more reactive gases, such as those involved in dry etching. At the same time, cleanroom environments are growing in complexity, with higher air exchange rates and tighter contamination controls.
Regulatory pressure is also growing around monitoring fluorinated greenhouse gases like SF₆ and NF₃. These trends demand flexible, high-sensitivity gas analysis solutions capable of adapting to evolving safety and environmental requirements.
Gasmet’s solutions for the semiconductor industry
Gasmet ambient gas analyzer GT5000 Terra
The portable and rugged design makes the GT5000 Terra ideal for leak detection in semiconductor facilities, providing early identification of potential hazards. This capability helps to reduce the risk of accidental exposure to toxic gases, ensuring a safer working environment for employees. Additionally, the analyzer’s ease of use allows for continuous monitoring of ambient air quality in cleanrooms and work areas, protecting employee health and ensuring compliance with workplace safety standards.
As the semiconductor industry evolves, the importance of effective leak detection and comprehensive workplace safety measures will continue to grow, with the GT5000 Terra playing a crucial role in safeguarding workers and meeting industry requirements.
Take a closer look at GT5000 Terra here
GT6000 Mobilis multi-gas analyzer – designed for hot/moist gas monitoring
With its compact size, high sensitivity, and ease of use, the GT6000 Mobilis ensures that semiconductor manufacturers can effectively control emissions. By providing real-time data, the analyzer supports compliance with environmental regulations, helping manufacturers track emissions of fluorinated gases, VOCs, and other pollutants.
As the industry moves towards stricter emission standards, FTIR gas analyzers like the GT6000 Mobilis are essential in driving environmental sustainability within semiconductor manufacturing.
Take a closer look at GT6000 Mobilis here
CEMS II e – Continuous emissions monitoring for semiconductor processes
In addition to portable solutions, Gasmet also provides fixed Continuous Emissions Monitoring Systems (CEMS) that are already in use within the semiconductor industry. These systems offer continuous, real-time monitoring of process emissions, enabling manufacturers to track and report releases of greenhouse gases and other hazardous compounds. Designed for demanding industrial applications, CEMS II e helps semiconductor facilities ensure compliance with strict environmental regulations and maintain high standards of process safety and control.